三(乙基甲氨基)(叔丁基亚氨基)钽(V) , 98% , ≥99.99% metal basis, 用于CVD/ALD, 钢瓶订购和清洗请见详情页
(t-Butylimido)tris(ethylmethylamino)tantalum(V), 98%, ≥99.99% metal basis, for CVD/ALD, please refer to the details page for ordering and cleaning cylinder
分子式: C13H33N4Ta
分子量: 426.38
纯度: 98%
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