六甲基二硅氧烷 , 97+%
Hexamethyldisiloxane, 97+% HMDSO
危化品
分子式: (CH?)?SiOSi(CH?)
分子量: 162.38
纯度: 97+%
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基本信息
安全信息
化学和物理性质
产品描述
Technical Notes：
1.Organosilicon precursor used in the plasma- enhanced chemical vapour deposition (PECVD) process of super hydrophobic C-rich polymeric (silicone-like, SiCx yOz) and doped semiconducting SiOẞfilms and coatings 1-7.
References:
1.Appl. Surf. Sci., 2010, 256, 2509
2.J. Phys. Chem. c, 2011, 115, 22225
3.Appl. Surf. Sci., 2011, 257, 3786
4.RSC Adv., 2014, 4, 45442
5.Thin Solid Films, 2015, 590, 299
6.Surf. Coat. Tech., 2016, 225
7.Nanomaterials, 2018, 8, 530
